上海昕潼贸易有限公司，原装进口超大流量气体质量流量控制器，MS3800VA模拟式气体质量流量控制器英文操作手册，流量范围5000SLPM（标准升每分钟），不锈钢316L主体设计，耐腐蚀，精度高，稳定性好。The M-SERIES of Line Tech Mass Flow Controller (MFC) is a device designed for
accurately measuring and controlling flow rates of gases. This manual is intended to provide the user with all the information to install successfully.
The Line Tech of Mass Flow Controller is used widely in the Semiconductor industry as
well as many other gas control system.
Mass Flow Controller is classified into three parts. (Body, P.C.B, Control valve) This harmony produces stable gas flow of rate as well readjusting gas pressure continuously.